A MEMS-based tracking milli-mirror for high-density optical disk drives

We present a new MEMS-based milli-mirror for precise tracking in high-density optical disk drives (ODDs). The device consists of a torsionally suspended mirror plate, one pair of torsion springs, which support the mirror plate and offer a restoring torque, and two pairs of electrodes attached to the...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2007-02, Vol.133 (2), p.368-374
Hauptverfasser:	Yang, J.P., Low, L.N., Johnson, D.
Format:	Artikel
Sprache:	eng
Schlagworte:	MEMS mirror Microactuator Microfabrication Optical disk drive Servo control
Online-Zugang:	Volltext
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