Thin film stress measurement by fiber optic strain gage

In this work, we present a new optical Fiber Bragg Grating (FBG) strain sensor which can be utilized to measure in situ the induced substrate strain caused by the film stress. The fiber optical sensor is interfaced to an analyzer to determine the wavelength shift of the reflected signal due to strai...

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Veröffentlicht in:	Thin solid films 2006-01, Vol.494 (1), p.141-145
Hauptverfasser:	Quintero, S.M.M., Quirino, W.G., Triques, A.L.C., Valente, L.C.G., Braga, A.M.B., Achete, C.A., Cremona, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Elasticity, elastic constants Exact sciences and technology Fiber bragg grating Materials science Mechanical and acoustical properties of condensed matter Mechanical properties of solids Methods of deposition of films and coatings film growth and epitaxy Physics Residual stress Strain gage
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