Synthesis and mechanical evaluation of quaternary Ti–Cr–Si–N coatings deposited by a hybrid method of arc ion plating and sputtering techniques
New quaternary Ti–Cr–Si–N coatings were synthesized onto steel substrates (AISI D2) and Si wafers using a hybrid method of arc ion plating (AIP) and sputtering techniques. For the syntheses of Ti–Cr–Si–N coatings, the Ti–Cr–N coating process was performed substantially by a multi-cathodic AIP techni...
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| Veröffentlicht in: | Surface & coatings technology 2005-11, Vol.200 (5), p.1489-1494 |
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| container_title | Surface & coatings technology |
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| creator | Lee, Dong Keun Kang, Dong Shik Suh, Ju Hyung Park, Chan-Gyung Kim, Kwang Ho |
| description | New quaternary Ti–Cr–Si–N coatings were synthesized onto steel substrates (AISI D2) and Si wafers using a hybrid method of arc ion plating (AIP) and sputtering techniques. For the syntheses of Ti–Cr–Si–N coatings, the Ti–Cr–N coating process was performed substantially by a multi-cathodic AIP technique using Cr and Ti targets, and Si could be added by sputtering Si target during Ti–Cr–N deposition. In this work, comparative studies on microstructure and evaluation of mechanical properties between Ti–Cr–N and Ti–Cr–Si–N coatings were conducted. As the Si was incorporated into Ti–Cr–N coatings, the Ti–Cr–Si–N coatings showed largely increased hardness value of approximately 42 GPa than one of 28 GPa for Ti–Cr–N coatings. The average friction coefficient of Ti–Cr–N coatings largely decreased from 0.7 to 0.35 with increasing Si content up to 20 at.%. |
| doi_str_mv | 10.1016/j.surfcoat.2005.08.023 |
| format | Article |
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For the syntheses of Ti–Cr–Si–N coatings, the Ti–Cr–N coating process was performed substantially by a multi-cathodic AIP technique using Cr and Ti targets, and Si could be added by sputtering Si target during Ti–Cr–N deposition. In this work, comparative studies on microstructure and evaluation of mechanical properties between Ti–Cr–N and Ti–Cr–Si–N coatings were conducted. As the Si was incorporated into Ti–Cr–N coatings, the Ti–Cr–Si–N coatings showed largely increased hardness value of approximately 42 GPa than one of 28 GPa for Ti–Cr–N coatings. 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For the syntheses of Ti–Cr–Si–N coatings, the Ti–Cr–N coating process was performed substantially by a multi-cathodic AIP technique using Cr and Ti targets, and Si could be added by sputtering Si target during Ti–Cr–N deposition. In this work, comparative studies on microstructure and evaluation of mechanical properties between Ti–Cr–N and Ti–Cr–Si–N coatings were conducted. As the Si was incorporated into Ti–Cr–N coatings, the Ti–Cr–Si–N coatings showed largely increased hardness value of approximately 42 GPa than one of 28 GPa for Ti–Cr–N coatings. The average friction coefficient of Ti–Cr–N coatings largely decreased from 0.7 to 0.35 with increasing Si content up to 20 at.%.</description><subject>AIP</subject><subject>Applied sciences</subject><subject>Contact of materials. Friction. Wear</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Materials science</subject><subject>Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology</subject><subject>Metals. Metallurgy</subject><subject>Microhardness</subject><subject>Other topics in materials science</subject><subject>Physics</subject><subject>Production techniques</subject><subject>Sputtering</subject><subject>Surface treatment</subject><subject>Ti–Cr–Si–N</subject><subject>Wear behavior</subject><issn>0257-8972</issn><issn>1879-3347</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqFkc2KFDEUhYMo2I6-gmSjuyrz15XKTmn8g0EXM65DKj92muqkJkkN9G7eQXxBn8RkesTlbJJ74dzzwTkAvMaoxwgP7w59XpPTUZWeILTt0dgjQp-ADR656Chl_CnYILLl3Sg4eQ5e5HxACGEu2Ab8vjqFsrfZZ6iCgUer9yp4rWZob9W8quJjgNHBmzraFFQ6wWv_5-7XLtXnqk3fYEP78DNDY5eYfbEGTieo4P40Jd88yz6aZqKShs1vme8P7ol5WUt1bmup8OBvVptfgmdOzdm-evgvwI9PH693X7rL75-_7j5cdpohVjpKjGNCD4PFE1eMGIMVVWQazMTNSLcD06MWYtDj1gnkqCNIEaIRI1g4Yjm9AG_PvkuKjVvk0Wdt51kFG9csiRgEx4I-Lhx5TZQ1x-Es1CnmnKyTS_LHGpvESLa65EH-q0u2uiQaZa2rHr55IKhc43dJBe3z_2vOBCOUVd37s87WXG69TTJrb4O2xierizTRP4b6C4dntOA</recordid><startdate>20051121</startdate><enddate>20051121</enddate><creator>Lee, Dong Keun</creator><creator>Kang, Dong Shik</creator><creator>Suh, Ju Hyung</creator><creator>Park, Chan-Gyung</creator><creator>Kim, Kwang Ho</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>7TB</scope><scope>FR3</scope></search><sort><creationdate>20051121</creationdate><title>Synthesis and mechanical evaluation of quaternary Ti–Cr–Si–N coatings deposited by a hybrid method of arc ion plating and sputtering techniques</title><author>Lee, Dong Keun ; Kang, Dong Shik ; Suh, Ju Hyung ; Park, Chan-Gyung ; Kim, Kwang Ho</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c404t-32df49c66e1b7a42dd1a3a2b6db7d83564c8c996c85f90f3f20a22c04219f2e73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>AIP</topic><topic>Applied sciences</topic><topic>Contact of materials. 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Metallurgy</topic><topic>Microhardness</topic><topic>Other topics in materials science</topic><topic>Physics</topic><topic>Production techniques</topic><topic>Sputtering</topic><topic>Surface treatment</topic><topic>Ti–Cr–Si–N</topic><topic>Wear behavior</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lee, Dong Keun</creatorcontrib><creatorcontrib>Kang, Dong Shik</creatorcontrib><creatorcontrib>Suh, Ju Hyung</creatorcontrib><creatorcontrib>Park, Chan-Gyung</creatorcontrib><creatorcontrib>Kim, Kwang Ho</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Engineering Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lee, Dong Keun</au><au>Kang, Dong Shik</au><au>Suh, Ju Hyung</au><au>Park, Chan-Gyung</au><au>Kim, Kwang Ho</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Synthesis and mechanical evaluation of quaternary Ti–Cr–Si–N coatings deposited by a hybrid method of arc ion plating and sputtering techniques</atitle><jtitle>Surface & coatings technology</jtitle><date>2005-11-21</date><risdate>2005</risdate><volume>200</volume><issue>5</issue><spage>1489</spage><epage>1494</epage><pages>1489-1494</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><coden>SCTEEJ</coden><abstract>New quaternary Ti–Cr–Si–N coatings were synthesized onto steel substrates (AISI D2) and Si wafers using a hybrid method of arc ion plating (AIP) and sputtering techniques. 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| source | Elsevier ScienceDirect Journals |
| subjects | AIP Applied sciences Contact of materials. Friction. Wear Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Microhardness Other topics in materials science Physics Production techniques Sputtering Surface treatment Ti–Cr–Si–N Wear behavior |
| title | Synthesis and mechanical evaluation of quaternary Ti–Cr–Si–N coatings deposited by a hybrid method of arc ion plating and sputtering techniques |
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