Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process

A sequential micromolding and pyrolysis process is presented for fabricating three-dimensional (3D) SiC-based ceramic micropatterns with a submicron scale resolution using preceramic resins, which is a promising technique for diverse applications such as tribological micro-stamps of hot embossing. F...

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Veröffentlicht in:	Microelectronic engineering 2006-11, Vol.83 (11), p.2475-2481
Hauptverfasser:	Lim, Tae Woo, Park, Sang Hu, Yang, Dong-Yol, Pham, Tuan Anh, Lee, Dong Hoon, Kim, Dong-Pyo, Chang, Sung-Il, Yoon, Jun-Bo
Format:	Artikel
Sprache:	eng
Schlagworte:	3D Ceramic microstructures Applied sciences Diffuser lithography Display Electronics Exact sciences and technology Microelectronic fabrication (materials and surfaces technology) Micromolding Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Two-photon process
Online-Zugang:	Volltext
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