Copper phthalocyanine suspended gate field effect transistors for NO2 detection

NO2 sensitive suspended gate (SG) field effect transistors (FET) based on copper phthalocyanine (CuPc) thin layers have been produced and investigated. The sensor structure is a hybrid one. The SG includes the CuPc sensing layer deposited in an independent process by thermal evaporation on the gate...

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Veröffentlicht in:	Sensors and actuators. B, Chemical Chemical, 2006-10, Vol.118 (1-2), p.249-254
Hauptverfasser:	Oprea, A, Weimar, U, Simon, E, Fleischer, M, Frerichs, H P, Wilbertz, Ch, Lehmann, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Channels Copper COPPER PHTHALOCYANINE Detection ELECTRONIC PRODUCTS Field effect transistors Gates Nitrogen dioxide NITROGEN OXIDE Semiconductor devices Sensors TRANSISTORS
Online-Zugang:	Volltext
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