Bulk and surface micromachined MEMS in thin film SOI technolog

Silicon-on-insulator (SOI) technology is emerging as a major contender for heterogeneous microsystems applications. In this work, we demonstrate the advantages of SOI technology for building thin film sensors on membranes as well as three-dimensional (3D) surface micromachined sensors and actuators....

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Veröffentlicht in:	Electrochimica acta 2007-02, Vol.52 (8), p.2850-2861
Hauptverfasser:	Raskin, J-P, Iker, F, Andre, N, Olbrechts, B, Pardoen, T, Flandre, D
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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