Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices
Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4 μm wide) separated from the la...
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| Veröffentlicht in: | Applied surface science 2005-12, Vol.252 (5), p.1710-1715 |
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| creator | Dhayal, Marshal Jeong, Hyung Gon Choi, Jeong Sik |
| description | Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4
μm wide) separated from the large electrode (20
μm wide) by 20
μm and 6
μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100
°C) due to low
T
g of polymeric material. The fluidic velocity measurement shows a maximum of about 450
μm/s in a 150
μm channel width of organic micro-fluidic devices after plasma surface modification. |
| doi_str_mv | 10.1016/j.apsusc.2005.03.198 |
| format | Article |
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μm wide) separated from the large electrode (20
μm wide) by 20
μm and 6
μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100
°C) due to low
T
g of polymeric material. The fluidic velocity measurement shows a maximum of about 450
μm/s in a 150
μm channel width of organic micro-fluidic devices after plasma surface modification.</description><identifier>ISSN: 0169-4332</identifier><identifier>EISSN: 1873-5584</identifier><identifier>DOI: 10.1016/j.apsusc.2005.03.198</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Acrylic acid ; Bio-MEMS ; Bonding ; Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Micro-fluidics ; Physics ; Plasma polymerisation</subject><ispartof>Applied surface science, 2005-12, Vol.252 (5), p.1710-1715</ispartof><rights>2005 Elsevier B.V.</rights><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c464t-165b47b997e666a5a9eb5a7be95fd483bef08006d643dd7f9ad540520166f6413</citedby><cites>FETCH-LOGICAL-c464t-165b47b997e666a5a9eb5a7be95fd483bef08006d643dd7f9ad540520166f6413</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.apsusc.2005.03.198$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,780,784,3550,27924,27925,45995</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=17514795$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Dhayal, Marshal</creatorcontrib><creatorcontrib>Jeong, Hyung Gon</creatorcontrib><creatorcontrib>Choi, Jeong Sik</creatorcontrib><title>Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices</title><title>Applied surface science</title><description>Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4
μm wide) separated from the large electrode (20
μm wide) by 20
μm and 6
μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100
°C) due to low
T
g of polymeric material. The fluidic velocity measurement shows a maximum of about 450
μm/s in a 150
μm channel width of organic micro-fluidic devices after plasma surface modification.</description><subject>Acrylic acid</subject><subject>Bio-MEMS</subject><subject>Bonding</subject><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Micro-fluidics</subject><subject>Physics</subject><subject>Plasma polymerisation</subject><issn>0169-4332</issn><issn>1873-5584</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNqFkE1r3DAQhkVoINsk_yAHX9KbXcn6sHUplGXTFBJ6aHLJRcjSCLTYK0ezu7D_vkod6C09DWied0bzEHLDaMMoU1-3jZ3xgK5pKZUN5Q3T_RlZsb7jtZS9-ERWBdO14Ly9IJ8Rt5SytnRX5OUZoUqhmkeLk63mNJ4myBHtPqZdNefkALEKKVfBDjm65b0Ehpjqx83j77-9Kbqc6jAeoo-u8nCMJXZFzoMdEa7f6yV5vts8re_rh18_fq6_P9ROKLGvmZKD6AatO1BKWWk1DNJ2A2gZvOj5AIH2lCqvBPe-C9p6Kahsy0UqKMH4JfmyzC2_fT0A7s0U0cE42h2kA5pWSy04pf8H-04o2bcFFAtYrkLMEMyc42TzyTBq3oybrVmMmzfjhnJTjJfY7ft8i86OIdudi_gv20kmOi0L923hoFg5RsgGXYSdAx8zuL3xKX686A-TlJjX</recordid><startdate>20051215</startdate><enddate>20051215</enddate><creator>Dhayal, Marshal</creator><creator>Jeong, Hyung Gon</creator><creator>Choi, Jeong Sik</creator><general>Elsevier B.V</general><general>Elsevier Science</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7SR</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope><scope>7TB</scope><scope>FR3</scope></search><sort><creationdate>20051215</creationdate><title>Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices</title><author>Dhayal, Marshal ; Jeong, Hyung Gon ; Choi, Jeong Sik</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c464t-165b47b997e666a5a9eb5a7be95fd483bef08006d643dd7f9ad540520166f6413</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Acrylic acid</topic><topic>Bio-MEMS</topic><topic>Bonding</topic><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Micro-fluidics</topic><topic>Physics</topic><topic>Plasma polymerisation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Dhayal, Marshal</creatorcontrib><creatorcontrib>Jeong, Hyung Gon</creatorcontrib><creatorcontrib>Choi, Jeong Sik</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Engineering Research Database</collection><jtitle>Applied surface science</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Dhayal, Marshal</au><au>Jeong, Hyung Gon</au><au>Choi, Jeong Sik</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices</atitle><jtitle>Applied surface science</jtitle><date>2005-12-15</date><risdate>2005</risdate><volume>252</volume><issue>5</issue><spage>1710</spage><epage>1715</epage><pages>1710-1715</pages><issn>0169-4332</issn><eissn>1873-5584</eissn><abstract>Using a plasma polymerisation process with optical lithography, wet and dry etching techniques we have fabricated an organic micro-fluidic device (OMDF) on silicon/glass substrate. An asymmetric electrode array used in micro-fluidic device (MFD) with small electrode (4
μm wide) separated from the large electrode (20
μm wide) by 20
μm and 6
μm gaps in both sides respectively. In this study we have found that plasma polymerisation process is not only important for changing the surface chemical and physical properties but also has advantage in bonding of these micro devices at low temperature (∼100
°C) due to low
T
g of polymeric material. The fluidic velocity measurement shows a maximum of about 450
μm/s in a 150
μm channel width of organic micro-fluidic devices after plasma surface modification.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.apsusc.2005.03.198</doi><tpages>6</tpages></addata></record> |
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| ispartof | Applied surface science, 2005-12, Vol.252 (5), p.1710-1715 |
| issn | 0169-4332 1873-5584 |
| language | eng |
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| source | Elsevier ScienceDirect Journals Complete |
| subjects | Acrylic acid Bio-MEMS Bonding Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Micro-fluidics Physics Plasma polymerisation |
| title | Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices |
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