Safety benefits of using a sub-atmospheric pressure hydride gas source for MOCVD

The reduced risks associated with storing toxic and flammable hydride gases on a high surface area substrate within a cylinder at sub-atmospheric pressures have been assessed. Tests have been performed on 2.2 and 49 L sub-atmospheric pressure cylinders filled to various pressures with arsine and pho...

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Veröffentlicht in:	Journal of crystal growth 2004-12, Vol.272 (1), p.822-828
Hauptverfasser:	Raynor, Mark W., Houlding, Virginia H., Frye, Russell, Olander, Karl
Format:	Artikel
Sprache:	eng
Schlagworte:	A1. Adsorption A1. Sub-atmospheric pressure gas source A2. Safety B1. Hydride gases Exact sciences and technology Laboratory procedures Laboratory safety procedures Laboratory safety procedures (National and international laboratory facilities, see 0152) Metrology, measurements and laboratory procedures Physics
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