Substrate influence in Young's modulus determination of thin films by indentation methods: Cubic boron nitride as an example

This paper deals with the determination of Young's modulus of thin films by indentation methods using cubic boron nitride (c-BN) as an example. This is a non-trivial task because the Young's modulus of this material comes close to that of the diamond indenter. An analysis of results from l...

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Veröffentlicht in:	Surface & coatings technology 2006-12, Vol.201 (6), p.3577-3587
Hauptverfasser:	Richter, F., Herrmann, M., Molnar, F., Chudoba, T., Schwarzer, N., Keunecke, M., Bewilogua, K., Zhang, X.W., Boyen, H.-G., Ziemann, P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cubic boron nitride Exact sciences and technology Mechanical properties Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Thin film Young's modulus
Online-Zugang:	Volltext
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