Optical and electrical properties of polymerizing plasmas and their correlation with DLC film properties

Much has been discovered about the effect of the parameters used in chemical vapor deposition on the properties of DLC films. Relatively little, however, is known about the basic mechanisms that lead to film formation. The major emphasis in this study is on the relationships between plasma and film...

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Veröffentlicht in:	Plasmas and polymers 2004-03, Vol.9 (1), p.1-22
Hauptverfasser:	RANGEL, Elidiane C, DA CRUZ, Nilson C, KAYAMA, Milton E, RANGEL, Rita C. C, MARINS, Nazir, DURRANT, Steven F
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous semiconductors glasses Amorphous semiconductors glasses nanocrystalline materials Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Electrical properties of specific thin films Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Fullerenes and related materials diamonds, graphite Materials science Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma applications Specific materials
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