The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD
DLC (Diamond Like Carbon) films show very desirable surface interactions with high hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of hydrogenated DLC film is dependent on tribological environment, especially surrounding temperature. In this work, the t...
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Veröffentlicht in: | Key engineering materials 2006-12, Vol.326-328, p.301-304 |
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creator | Jeon, Hong Gyu Lee, Young Ze Cho, Yong Kyung Cho, Dae Hyun |
description | DLC (Diamond Like Carbon) films show very desirable surface interactions with high
hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of
hydrogenated DLC film is dependent on tribological environment, especially surrounding
temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared
by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were
studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were
conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding various temperatures of 25,
40, 55 and 75. The results show considerable dependency of DLC tribological parameters on
temperature. The friction coefficient decreased as the surrounding temperature increased. After tests
the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron
spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track
were also obtained by an atomic force microscope (AFM). |
doi_str_mv | 10.4028/www.scientific.net/KEM.326-328.301 |
format | Article |
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hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of
hydrogenated DLC film is dependent on tribological environment, especially surrounding
temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared
by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were
studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were
conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding various temperatures of 25,
40, 55 and 75. The results show considerable dependency of DLC tribological parameters on
temperature. The friction coefficient decreased as the surrounding temperature increased. After tests
the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron
spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track
were also obtained by an atomic force microscope (AFM).</description><identifier>ISSN: 1013-9826</identifier><identifier>ISSN: 1662-9795</identifier><identifier>EISSN: 1662-9795</identifier><identifier>DOI: 10.4028/www.scientific.net/KEM.326-328.301</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><ispartof>Key engineering materials, 2006-12, Vol.326-328, p.301-304</ispartof><rights>2006 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c301t-f131108a63658d3c38abc241926820d6dfaf9693e72534f38d1a438534b343383</citedby><cites>FETCH-LOGICAL-c301t-f131108a63658d3c38abc241926820d6dfaf9693e72534f38d1a438534b343383</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/45?width=600</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Jeon, Hong Gyu</creatorcontrib><creatorcontrib>Lee, Young Ze</creatorcontrib><creatorcontrib>Cho, Yong Kyung</creatorcontrib><creatorcontrib>Cho, Dae Hyun</creatorcontrib><title>The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD</title><title>Key engineering materials</title><description>DLC (Diamond Like Carbon) films show very desirable surface interactions with high
hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of
hydrogenated DLC film is dependent on tribological environment, especially surrounding
temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared
by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were
studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were
conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding various temperatures of 25,
40, 55 and 75. The results show considerable dependency of DLC tribological parameters on
temperature. The friction coefficient decreased as the surrounding temperature increased. After tests
the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron
spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track
were also obtained by an atomic force microscope (AFM).</description><issn>1013-9826</issn><issn>1662-9795</issn><issn>1662-9795</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNqVkE1PwzAMhisEEmPwH3rigNQuidssPbJug4khEBpcozRNWKZ-jKRl2r8nU5E4c7Bs-bVf2U8Q3GEUJ4iwyeFwiJ00qumMNjJuVDd5WjzHQGgEhMWA8FkwwpSSKJtm6bmvEYYoY4ReBlfO7RACzHA6Cvhmq8JVo6teNVKFrQ4739ioeq-s6Hp7EqVVwnmtGTRrirZqP40UVThTW_FtWntanK_zcGmq2oXFMXxbRq-L_GN-HVxoUTl185vHwftysckfo_XLwyq_X0fS39pFGgPGiAkKNGUlSGCikCTBGaGMoJKWWuiMZqCmJIVEAyuxSID5uoAEgME4uB1897b96pXreG2cVFUlGtX2jpMsnRJMUz84GwalbZ2zSvO9NbWwR44RP7Hlni3_Y8s9W-7Zcs_WB-P-Xm8yH0w6KxrXKbnlu7a3jf_wPzY_pOWKig</recordid><startdate>20061201</startdate><enddate>20061201</enddate><creator>Jeon, Hong Gyu</creator><creator>Lee, Young Ze</creator><creator>Cho, Yong Kyung</creator><creator>Cho, Dae Hyun</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20061201</creationdate><title>The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD</title><author>Jeon, Hong Gyu ; Lee, Young Ze ; Cho, Yong Kyung ; Cho, Dae Hyun</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c301t-f131108a63658d3c38abc241926820d6dfaf9693e72534f38d1a438534b343383</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jeon, Hong Gyu</creatorcontrib><creatorcontrib>Lee, Young Ze</creatorcontrib><creatorcontrib>Cho, Yong Kyung</creatorcontrib><creatorcontrib>Cho, Dae Hyun</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Key engineering materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jeon, Hong Gyu</au><au>Lee, Young Ze</au><au>Cho, Yong Kyung</au><au>Cho, Dae Hyun</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD</atitle><jtitle>Key engineering materials</jtitle><date>2006-12-01</date><risdate>2006</risdate><volume>326-328</volume><spage>301</spage><epage>304</epage><pages>301-304</pages><issn>1013-9826</issn><issn>1662-9795</issn><eissn>1662-9795</eissn><abstract>DLC (Diamond Like Carbon) films show very desirable surface interactions with high
hardness, low friction coefficient, and good wear-resistance properties. The friction behavior of
hydrogenated DLC film is dependent on tribological environment, especially surrounding
temperature. In this work, the tribological behaviors of DLC (Diamond-like carbon) films, prepared
by the radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method, were
studied in elevated temperatures. The ball-on-disk tests with DLC films on steel specimens were
conducted at a sliding speed of 60 rpm, a load of 10 N, and surrounding various temperatures of 25,
40, 55 and 75. The results show considerable dependency of DLC tribological parameters on
temperature. The friction coefficient decreased as the surrounding temperature increased. After tests
the wear tracks of hydrogenated DLC film were analyzed by optical microscope, scanning electron
spectroscopy (SEM) and Raman spectroscopy. The surface roughness and 3-D images of wear track
were also obtained by an atomic force microscope (AFM).</abstract><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/KEM.326-328.301</doi><tpages>4</tpages></addata></record> |
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title | The Influence of the Temperature Increase on the Tribological Behavior of DLC Films by RF-PECVD |
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