Ramifications of lubrication theory on imprint lithography

During photo-imprint lithography processes, such as Step and Flash Imprint Lithography, a fluid is displaced from the gap between a template and a substrate. Since the width of the template is much greater than the gap height from which the fluid is being expelled, lubrication theory approximations...

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Veröffentlicht in:	Microelectronic engineering 2004-09, Vol.75 (3), p.321-329
Hauptverfasser:	Colburn, Matthew, Choi, Byung Jin, Sreenivasan, S.V., Bonnecaze, Roger T., Grant Willson, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Fluid dynamics Imprint Lithography Microelectronic fabrication (materials and surfaces technology) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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