As-deposited LiCoO2 thin film cathodes prepared by rf magnetron sputtering

LiCoO2 thin films were deposited using radio frequency (rf) magnetron sputtering system on stainless steel substrates. Different rf powers, up to 150W, were applied during deposition. The as-deposited films exhibited (101) and (104) preferred orientation and the nanocrystalline film structure was en...

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Veröffentlicht in:Electrochimica acta 2005-10, Vol.51 (2), p.268-273
Hauptverfasser: JEON, Shin-Wook, LIM, Jung-Kyu, LIM, Sung-Hwan, LEE, Sung-Man
Format: Artikel
Sprache:eng
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