In situ ellipsometry of surface layer of non-metallic transparent materials during its finish processing

For modern technology applications it is important to develop non-contact methods of control of the modification of dielectric materials surface layer. The aim of the work is to determine the level of roughness changes in the surface layer of non-metallic material, optical glass BK-7, and to control...

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Veröffentlicht in:	Applied surface science 2006-10, Vol.253 (1), p.163-166
Hauptverfasser:	Filatov, Oleksandr Y., Poperenko, Leonid V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Ellipsometry Exact sciences and technology Materials science Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics Polishing Roughness Surface Surface treatments
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