Plasma enhanced surface treatments using electron beam-generated plasmas

NRL has developed a ‘large area plasma processing system’ (LAPPS) utilizing a high energy (∼2 keV) modulated electron beam to drive the plasma ionization. This system has been shown to be (1) efficient at producing plasma in any gas composition, (2) capable of producing low temperature plasma electr...

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Bibliographische Detailangaben

Veröffentlicht in:	Surface & coatings technology 2004-11, Vol.188, p.299-306
Hauptverfasser:	Leonhardt, D., Muratore, C., Walton, S.G., Meger, R.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	E-beam Generated Plasma Magnetron Nitriding PACVD Pulsed Reactive Sputtering
Online-Zugang:	Volltext
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