Plasma enhanced surface treatments using electron beam-generated plasmas

Plasma enhanced surface treatments using electron beam-generated plasmas

NRL has developed a ‘large area plasma processing system’ (LAPPS) utilizing a high energy (∼2 keV) modulated electron beam to drive the plasma ionization. This system has been shown to be (1) efficient at producing plasma in any gas composition, (2) capable of producing low temperature plasma electr...

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Veröffentlicht in:Surface & coatings technology 2004-11, Vol.188, p.299-306
Hauptverfasser: Leonhardt, D., Muratore, C., Walton, S.G., Meger, R.A.
Format: Artikel
Sprache:eng
Schlagworte:
E-beam Generated Plasma
Magnetron
Nitriding
PACVD
Pulsed
Reactive Sputtering
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Zusammenfassung:NRL has developed a ‘large area plasma processing system’ (LAPPS) utilizing a high energy (∼2 keV) modulated electron beam to drive the plasma ionization. This system has been shown to be (1) efficient at producing plasma in any gas composition, (2) capable of producing low temperature plasma electrons (
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2004.08.195