Effect of zero-Gauss plane and magnetic intensity on oxygen concentration in cusp-magnetic CZ crystals

The control of oxygen concentration in 200 mm-diameter Si single crystals is studied in the cusp-magnetic Czochralski method, and the effects of zero-Gauss plane (ZGP), ZGP shape, which is due to magnetic ratio (MR) of the lower to upper current densities in the configurations of the cusp-magnetic f...

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Veröffentlicht in:	Journal of crystal growth 2006-10, Vol.295 (2), p.141-147
Hauptverfasser:	Hong, Young-Ho, Sim, Bok-Cheol, Shim, Kwang-Bo
Format:	Artikel
Sprache:	eng
Schlagworte:	A1. Magnetic intensity A1. Oxygen concentration A1. Shape of zero-Gauss plane A1. Zero-Gauss plane A2. Czochralski method Cross-disciplinary physics: materials science rheology Exact sciences and technology Growth from melts zone melting and refining Materials science Methods of crystal growth physics of crystal growth Physics
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