Fabrication and Electro-Mechanical Characteristics of Piezoelectric Micro Bending Actuators on Silicon Substrates

Fabrication and the electro-mechanical characteristics of fourteen types of piezoelectric micro bending actuators (PMBA) on silicon substrates using sol-gel multi-coated, thick PZT (Pb(Zr0.52, Ti0.48)O3) films and MEMS processes were investigated. A PMBA was a piezoelectric body adhered to an elasti...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Journal of the Ceramic Society of Japan 2006, Vol.114(1335), pp.1089-1092
Hauptverfasser:	PARK, Joon-Shik, YANG, Seong Joon, LEE, Kyung-Il, KANG, Sung-Goon
Format:	Artikel
Sprache:	eng
Schlagworte:	Bending Actuator Diaphragm Displacements Long-term MEMS Piezoelectric
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!