Caesium/xenon dual beam depth profiling: Velocity of the sputtered atom and ionization probability

In this work, a caesium/xenon co-sputtering gun was used to perform depth profiles of a RhSi layer with varying caesium beam concentration. The positive ion yields were monitored with respect to the varying work function of the solid and the intensities of the ions were plotted with respect to the c...

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Veröffentlicht in:	Applied surface science 2006-07, Vol.252 (19), p.6440-6443
Hauptverfasser:	Brison, J., Douhard, B., Houssiau, L.
Format:	Artikel
Sprache:	eng
Schlagworte:	Caesium Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Depth profile Exact sciences and technology Ionization MCs Physics ToF-SIMS
Online-Zugang:	Volltext
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