Novel hybrid facing targets sputtered amorphous carbon overcoat for ultra-high density hard disk media

Amorphous carbon films form a critical protective layer on magnetic hard disk media. A novel in-house configured hybrid facing targets sputtering (HyFTS) utilizing a special magnetron arrangement was used to deposit amorphous carbon (a-C) overcoats. The corrosion inhibition ability and mechanical pr...

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Veröffentlicht in:Diamond and related materials 2007-02, Vol.16 (2), p.379-387
Hauptverfasser: Poh, W.C., Piramanayagam, S.N., Shi, J.R., Liew, T.
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container_end_page 387
container_issue 2
container_start_page 379
container_title Diamond and related materials
container_volume 16
creator Poh, W.C.
Piramanayagam, S.N.
Shi, J.R.
Liew, T.
description Amorphous carbon films form a critical protective layer on magnetic hard disk media. A novel in-house configured hybrid facing targets sputtering (HyFTS) utilizing a special magnetron arrangement was used to deposit amorphous carbon (a-C) overcoats. The corrosion inhibition ability and mechanical property were investigated and compared with that of the a-C overcoats deposited by conventional magnetron sputtering (CMS). Studies were done using electrochemical techniques and nano-scratch analysis to determine how corrosion inhibition ability changes at thickness of 2 nm and 5 nm and the scratch resistance of the two types of a-C overcoats, respectively. Electrochemical impedance spectroscopy and potentiodynamic polarization investigations have shown that a-C films deposited by HyFTS have good corrosion resistance even at 2 nm thickness. But at 2 nm, CMS deposited a-C overcoat shows sign of corrosion. Nano-scratch test has also shown improved scratch resistance of the HyFTS deposited a-C. This may be attributed to the better quality film with higher sp 3 content deposited by HyFTS as a result of it having a higher amount of ionized species generated.
doi_str_mv 10.1016/j.diamond.2006.07.020
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subjects Amorphous carbon
Coatings
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Corrosion
Cross-disciplinary physics: materials science
rheology
Deposition by sputtering
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Materials science
Mechanical and acoustical properties
Methods of deposition of films and coatings
film growth and epitaxy
Physical properties of thin films, nonelectronic
Physics
Sputtering
Surface and interface electron states
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
title Novel hybrid facing targets sputtered amorphous carbon overcoat for ultra-high density hard disk media
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