On high dose nitrogen implantation of PVD titanium nitride
A 3 × 3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties—a condition of over-implan...
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| Veröffentlicht in: | Surface & coatings technology 2006-05, Vol.200 (20), p.5915-5920 |
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| container_end_page | 5920 |
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| container_issue | 20 |
| container_start_page | 5915 |
| container_title | Surface & coatings technology |
| container_volume | 200 |
| creator | Sharkeev, Yurii P. Bull, Steve J. Perry, Anthony J. Klingenberg, Melissa L. Fortuna, Sergei V. Michler, Markus Manory, Rafael R. Shulepov, Ivan A. |
| description | A 3
×
3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties—a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO
2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3
×
10
17 ions cm
−
2
is optimal provided that the dose rate does not exceed the present industrial standard. |
| doi_str_mv | 10.1016/j.surfcoat.2005.09.010 |
| format | Article |
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×
3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties—a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO
2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3
×
10
17 ions cm
−
2
is optimal provided that the dose rate does not exceed the present industrial standard.</description><identifier>ISSN: 0257-8972</identifier><identifier>EISSN: 1879-3347</identifier><identifier>DOI: 10.1016/j.surfcoat.2005.09.010</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>Ion implantation ; Nitrogen ions ; Surface treatment ; Titanium nitride</subject><ispartof>Surface & coatings technology, 2006-05, Vol.200 (20), p.5915-5920</ispartof><rights>2005 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c405t-6f547d52b1d31aa91bd78cbd14b31000a7e3611d81821b5f8006e55fa0a60d553</citedby><cites>FETCH-LOGICAL-c405t-6f547d52b1d31aa91bd78cbd14b31000a7e3611d81821b5f8006e55fa0a60d553</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0257897205010686$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65306</link.rule.ids></links><search><creatorcontrib>Sharkeev, Yurii P.</creatorcontrib><creatorcontrib>Bull, Steve J.</creatorcontrib><creatorcontrib>Perry, Anthony J.</creatorcontrib><creatorcontrib>Klingenberg, Melissa L.</creatorcontrib><creatorcontrib>Fortuna, Sergei V.</creatorcontrib><creatorcontrib>Michler, Markus</creatorcontrib><creatorcontrib>Manory, Rafael R.</creatorcontrib><creatorcontrib>Shulepov, Ivan A.</creatorcontrib><title>On high dose nitrogen implantation of PVD titanium nitride</title><title>Surface & coatings technology</title><description>A 3
×
3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties—a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO
2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3
×
10
17 ions cm
−
2
is optimal provided that the dose rate does not exceed the present industrial standard.</description><subject>Ion implantation</subject><subject>Nitrogen ions</subject><subject>Surface treatment</subject><subject>Titanium nitride</subject><issn>0257-8972</issn><issn>1879-3347</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNqNkD1PwzAURS0EEqXwF1AmtoT3ktixmUB8S5XKAKyWEzutqyYutoPEvyelMJfpLudeXR1CzhEyBGSXqywMvm2cilkOQDMQGSAckAnySqRFUVaHZAI5rVIuqvyYnISwAgCsRDkhV_M-WdrFMtEumKS30buF6RPbbdaqjypa1yeuTV7e75Joo-rt0P1QVptTctSqdTBnvzklbw_3r7dP6Wz--Hx7M0ubEmhMWUvLStO8Rl2gUgJrXfGm1ljWBY4_VGUKhqg58hxr2nIAZihtFSgGmtJiSi52uxvvPgYTouxsaMx6PGjcEGQuypJxJv4D5shYvhdEIRinfLvIdmDjXQjetHLjbaf8l0SQW_lyJf_ky618CUKO8sfi9a5oRjGf1ngZGmv6xmjrTROldnbfxDeJoY_Q</recordid><startdate>20060522</startdate><enddate>20060522</enddate><creator>Sharkeev, Yurii P.</creator><creator>Bull, Steve J.</creator><creator>Perry, Anthony J.</creator><creator>Klingenberg, Melissa L.</creator><creator>Fortuna, Sergei V.</creator><creator>Michler, Markus</creator><creator>Manory, Rafael R.</creator><creator>Shulepov, Ivan A.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7QO</scope><scope>8FD</scope><scope>FR3</scope><scope>P64</scope><scope>7TB</scope><scope>7SR</scope><scope>8BQ</scope><scope>JG9</scope></search><sort><creationdate>20060522</creationdate><title>On high dose nitrogen implantation of PVD titanium nitride</title><author>Sharkeev, Yurii P. ; Bull, Steve J. ; Perry, Anthony J. ; Klingenberg, Melissa L. ; Fortuna, Sergei V. ; Michler, Markus ; Manory, Rafael R. ; Shulepov, Ivan A.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c405t-6f547d52b1d31aa91bd78cbd14b31000a7e3611d81821b5f8006e55fa0a60d553</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>Ion implantation</topic><topic>Nitrogen ions</topic><topic>Surface treatment</topic><topic>Titanium nitride</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Sharkeev, Yurii P.</creatorcontrib><creatorcontrib>Bull, Steve J.</creatorcontrib><creatorcontrib>Perry, Anthony J.</creatorcontrib><creatorcontrib>Klingenberg, Melissa L.</creatorcontrib><creatorcontrib>Fortuna, Sergei V.</creatorcontrib><creatorcontrib>Michler, Markus</creatorcontrib><creatorcontrib>Manory, Rafael R.</creatorcontrib><creatorcontrib>Shulepov, Ivan A.</creatorcontrib><collection>CrossRef</collection><collection>Biotechnology Research Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Materials Research Database</collection><jtitle>Surface & coatings technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Sharkeev, Yurii P.</au><au>Bull, Steve J.</au><au>Perry, Anthony J.</au><au>Klingenberg, Melissa L.</au><au>Fortuna, Sergei V.</au><au>Michler, Markus</au><au>Manory, Rafael R.</au><au>Shulepov, Ivan A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On high dose nitrogen implantation of PVD titanium nitride</atitle><jtitle>Surface & coatings technology</jtitle><date>2006-05-22</date><risdate>2006</risdate><volume>200</volume><issue>20</issue><spage>5915</spage><epage>5920</epage><pages>5915-5920</pages><issn>0257-8972</issn><eissn>1879-3347</eissn><abstract>A 3
×
3 matrix of samples has been ion implanted with nitrogen at low-to-high doses and low-to-high current densities (dose rates). All samples show surface exfoliation which results in a loss of the implanted nitrogen and a consequent loss of the wear-resistant properties—a condition of over-implantation reminiscent of that observed with metal ion implantation. There is an uptake of post-implantation oxygen which is believed to form an amorphous TiO
2 component in the surface leading to the well-established low frictional properties. This uptake decreases as the dose rate is increased and would lead to a loss of wear resistant properties. The work confirms that a dose of 3
×
10
17 ions cm
−
2
is optimal provided that the dose rate does not exceed the present industrial standard.</abstract><pub>Elsevier B.V</pub><doi>10.1016/j.surfcoat.2005.09.010</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0257-8972 |
| ispartof | Surface & coatings technology, 2006-05, Vol.200 (20), p.5915-5920 |
| issn | 0257-8972 1879-3347 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29446869 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Ion implantation Nitrogen ions Surface treatment Titanium nitride |
| title | On high dose nitrogen implantation of PVD titanium nitride |
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