Nanocomposite oxide and nitride hard coatings produced by pulse magnetron sputtering

In this work, the composition and the microstructure of two-phase hard coatings have been varied by reactive pulsed co-sputtering of two target materials to produce nanocomposite structures. Two material systems have been studied for their potential of improved properties induced by phase segregatio...

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Veröffentlicht in:	Surface & coatings technology 2005-10, Vol.200 (1-4), p.760-764
Hauptverfasser:	Klostermann, H., Böcher, B., Fietzke, F., Modes, T., Zywitzki, O.
Format:	Artikel
Sprache:	eng
Schlagworte:	Al2O3 Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Hard coatings Materials science Metals. Metallurgy Nanocomposite Other topics in materials science Physics Production techniques Pulse magnetron sputtering Surface treatment TiAlN ZrO2
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