Enhancing mechanical and tribological performance of multilayered CrN/ZrN coatings

The CrN/ZrN multilayered coatings with nanoscale bilayer period were synthesized at different substrate rotary speeds (4–11 rpm) and reaction gas flows in an unbalances reactive dc magnetron sputter chamber. XRD, AES, XPS, Nano indenter and tribometer were employed to investigate the influence of su...

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Veröffentlicht in:Surface & coatings technology 2007-02, Vol.201 (9), p.5186-5189
Hauptverfasser: Zhang, J.J., Wang, M.X., Yang, J., Liu, Q.X., Li, D.J.
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container_end_page 5189
container_issue 9
container_start_page 5186
container_title Surface & coatings technology
container_volume 201
creator Zhang, J.J.
Wang, M.X.
Yang, J.
Liu, Q.X.
Li, D.J.
description The CrN/ZrN multilayered coatings with nanoscale bilayer period were synthesized at different substrate rotary speeds (4–11 rpm) and reaction gas flows in an unbalances reactive dc magnetron sputter chamber. XRD, AES, XPS, Nano indenter and tribometer were employed to investigate the influence of substrate rotary speed, species of reaction gases and flows on microstructure, mechanical and tribological properties of the coatings. A layer structure with small modulation period synthesized by a proper percentage of NH 3 in N 2 reaction gas was proved to be of benefit to synthesize high hard (32 GPa) and low wear-resistant (wear rate: 0.3865 × 10 − 5  mm 3/Nm) CrN/ZrN coatings. These properties were related to strongly mixed Cr–N and Zr–N preferred orientations and nanolayer structure.
doi_str_mv 10.1016/j.surfcoat.2006.07.093
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source ScienceDirect Journals (5 years ago - present)
subjects Applied sciences
CrN/ZrN
Exact sciences and technology
Magnetron sputtering
Metals. Metallurgy
Multilayered coating
Production techniques
Surface treatment
title Enhancing mechanical and tribological performance of multilayered CrN/ZrN coatings
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