Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices

The micro/nanoelectromechanical systems (MEMS/NEMS) need to be designed to perform expected functions typically in millisecond to picosecond range. Expected life of the devices for high speed contacts can vary from few hundred thousand to many billions of cycles, e.g., over a hundred billion cycles...

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Bibliographische Detailangaben

Veröffentlicht in:	Microelectronic engineering 2007-03, Vol.84 (3), p.387-412
1. Verfasser:	Bhushan, Bharat
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology MEMS Micro- and nanoelectromechanical devices (mems/nems) Nanomaterials characterization Nanomechanics Nanotechnology NEMS Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online-Zugang:	Volltext
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