Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

Piezoelectric actuators that are used in atomic force microscopes (AFM) have undesirable properties. The nonlinear and hysteretic characteristics of piezoelectric actuators introduce geometric deformations in the reconstructed AFM images. Due to these deformations, the quantitative interpretation of...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2006-01, Vol.125 (2), p.590-596
Hauptverfasser:	Huang, Qiangxian, Gonda, Satoshi, Misumi, Ichiko, Sato, Osamu, Keem, Taeho, Kurosawa, Tomizo
Format:	Artikel
Sprache:	eng
Schlagworte:	1D grating AFM Hysteretic characteristic Lateral dimension Nonlinear characteristic Piezoelectric actuator Reference standard
Online-Zugang:	Volltext
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