Influence of various substrate materials on the structure and magnetic properties of Fe–N thin films deposited by DC magnetron sputtering

The Fe–N films were synthesized on glass, single crystal Si (100), and NaCl (100) substrate, respectively, by DC magnetron sputtering, and the substrate temperature was optimized to obtain the single-phase γ′-Fe 4N magnetic film. The structure and morphology of the samples were characterized using X...

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Veröffentlicht in:	Surface & coatings technology 2006-10, Vol.201 (3), p.786-791
Hauptverfasser:	Wang, L.L., Wang, X., Ma, N., Zheng, W.T., Jin, D.H., Zhao, Y.Y.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Cross-disciplinary physics: materials science rheology Exact sciences and technology Magnetic properties Materials science Metals. Metallurgy Methods of deposition of films and coatings film growth and epitaxy Physics Production techniques Substrate materials Surface treatment γ′-Fe 4N single-phase
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