High-resolution pressure sensor for photo acoustic gas detection
This paper presents a novel micromachined pressure sensor and its use in photo acoustic gas detection. The pressure sensor has a bossed membrane with two areas with different thicknesses, giving a resolution of 9 or 11 μV/V Pa, depending on the boss radius. At the same time, the burst pressure is ab...
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| Veröffentlicht in: | Sensors and actuators. A. Physical. 2006-11, Vol.132 (1), p.207-213 |
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| container_title | Sensors and actuators. A. Physical. |
| container_volume | 132 |
| creator | Schjølberg-Henriksen, K. Wang, D.T. Rogne, H. Ferber, A. Vogl, A. Moe, S. Bernstein, R. Lapadatu, D. Sandven, K. Brida, S. |
| description | This paper presents a novel micromachined pressure sensor and its use in photo acoustic gas detection. The pressure sensor has a bossed membrane with two areas with different thicknesses, giving a resolution of 9 or 11
μV/V
Pa, depending on the boss radius. At the same time, the burst pressure is above ±1
bar. Device fabrication and characterisation is presented, and the sensor is demonstrated to function in photo acoustic CO
2 cells manufactured both by manual mounting and anodic bonding. The sensor is designed for a high volume commercial foundry process, and the bonded photo acoustic cells are suitable for large-scale production. |
| doi_str_mv | 10.1016/j.sna.2006.02.019 |
| format | Article |
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μV/V
Pa, depending on the boss radius. At the same time, the burst pressure is above ±1
bar. Device fabrication and characterisation is presented, and the sensor is demonstrated to function in photo acoustic CO
2 cells manufactured both by manual mounting and anodic bonding. The sensor is designed for a high volume commercial foundry process, and the bonded photo acoustic cells are suitable for large-scale production.</description><identifier>ISSN: 0924-4247</identifier><identifier>EISSN: 1873-3069</identifier><identifier>DOI: 10.1016/j.sna.2006.02.019</identifier><language>eng</language><publisher>Elsevier B.V</publisher><subject>CO 2 ; Photo acoustic gas sensor ; Pressure sensor</subject><ispartof>Sensors and actuators. A. Physical., 2006-11, Vol.132 (1), p.207-213</ispartof><rights>2006 Elsevier B.V.</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c328t-71dbbc37f6bbc77644a7b765569b5e395cbc94983f00833b76f2815b99ba55863</citedby><cites>FETCH-LOGICAL-c328t-71dbbc37f6bbc77644a7b765569b5e395cbc94983f00833b76f2815b99ba55863</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.sciencedirect.com/science/article/pii/S0924424706001415$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>314,776,780,3537,27901,27902,65534</link.rule.ids></links><search><creatorcontrib>Schjølberg-Henriksen, K.</creatorcontrib><creatorcontrib>Wang, D.T.</creatorcontrib><creatorcontrib>Rogne, H.</creatorcontrib><creatorcontrib>Ferber, A.</creatorcontrib><creatorcontrib>Vogl, A.</creatorcontrib><creatorcontrib>Moe, S.</creatorcontrib><creatorcontrib>Bernstein, R.</creatorcontrib><creatorcontrib>Lapadatu, D.</creatorcontrib><creatorcontrib>Sandven, K.</creatorcontrib><creatorcontrib>Brida, S.</creatorcontrib><title>High-resolution pressure sensor for photo acoustic gas detection</title><title>Sensors and actuators. A. Physical.</title><description>This paper presents a novel micromachined pressure sensor and its use in photo acoustic gas detection. The pressure sensor has a bossed membrane with two areas with different thicknesses, giving a resolution of 9 or 11
μV/V
Pa, depending on the boss radius. At the same time, the burst pressure is above ±1
bar. Device fabrication and characterisation is presented, and the sensor is demonstrated to function in photo acoustic CO
2 cells manufactured both by manual mounting and anodic bonding. The sensor is designed for a high volume commercial foundry process, and the bonded photo acoustic cells are suitable for large-scale production.</description><subject>CO 2</subject><subject>Photo acoustic gas sensor</subject><subject>Pressure sensor</subject><issn>0924-4247</issn><issn>1873-3069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp9UMFKxDAUDKLguvoB3nry1vqSNEmDF2VRV1jwoueQpOlulm5Tk1bw782ynj085sGbGd4MQrcYKgyY3--rNOiKAPAKSAVYnqEFbgQtKXB5jhYgSV3WpBaX6CqlPQBQKsQCPa79dldGl0I_Tz4MxZj3NEdXJDekEIsuz7gLUyi0DXOavC22OhWtm5w9Cq7RRaf75G7-cIk-X54_Vuty8_76tnralJaSZioFbo2xVHQ8gxC8rrUwgjPGpWGOSmaNlbVsaAfQUJpPHWkwM1IazVjD6RLdnXzHGL5mlyZ18Mm6vteDy38pIrMJYJaJ-ES0MaQUXafG6A86_igM6tiV2qvclTp2pYCo3FXWPJw0Lif49i6qZL0brGt9zDFVG_w_6l_zcXHS</recordid><startdate>20061108</startdate><enddate>20061108</enddate><creator>Schjølberg-Henriksen, K.</creator><creator>Wang, D.T.</creator><creator>Rogne, H.</creator><creator>Ferber, A.</creator><creator>Vogl, A.</creator><creator>Moe, S.</creator><creator>Bernstein, R.</creator><creator>Lapadatu, D.</creator><creator>Sandven, K.</creator><creator>Brida, S.</creator><general>Elsevier B.V</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>20061108</creationdate><title>High-resolution pressure sensor for photo acoustic gas detection</title><author>Schjølberg-Henriksen, K. ; Wang, D.T. ; Rogne, H. ; Ferber, A. ; Vogl, A. ; Moe, S. ; Bernstein, R. ; Lapadatu, D. ; Sandven, K. ; Brida, S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c328t-71dbbc37f6bbc77644a7b765569b5e395cbc94983f00833b76f2815b99ba55863</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><topic>CO 2</topic><topic>Photo acoustic gas sensor</topic><topic>Pressure sensor</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Schjølberg-Henriksen, K.</creatorcontrib><creatorcontrib>Wang, D.T.</creatorcontrib><creatorcontrib>Rogne, H.</creatorcontrib><creatorcontrib>Ferber, A.</creatorcontrib><creatorcontrib>Vogl, A.</creatorcontrib><creatorcontrib>Moe, S.</creatorcontrib><creatorcontrib>Bernstein, R.</creatorcontrib><creatorcontrib>Lapadatu, D.</creatorcontrib><creatorcontrib>Sandven, K.</creatorcontrib><creatorcontrib>Brida, S.</creatorcontrib><collection>CrossRef</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Sensors and actuators. A. Physical.</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Schjølberg-Henriksen, K.</au><au>Wang, D.T.</au><au>Rogne, H.</au><au>Ferber, A.</au><au>Vogl, A.</au><au>Moe, S.</au><au>Bernstein, R.</au><au>Lapadatu, D.</au><au>Sandven, K.</au><au>Brida, S.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High-resolution pressure sensor for photo acoustic gas detection</atitle><jtitle>Sensors and actuators. A. Physical.</jtitle><date>2006-11-08</date><risdate>2006</risdate><volume>132</volume><issue>1</issue><spage>207</spage><epage>213</epage><pages>207-213</pages><issn>0924-4247</issn><eissn>1873-3069</eissn><abstract>This paper presents a novel micromachined pressure sensor and its use in photo acoustic gas detection. The pressure sensor has a bossed membrane with two areas with different thicknesses, giving a resolution of 9 or 11
μV/V
Pa, depending on the boss radius. At the same time, the burst pressure is above ±1
bar. Device fabrication and characterisation is presented, and the sensor is demonstrated to function in photo acoustic CO
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| identifier | ISSN: 0924-4247 |
| ispartof | Sensors and actuators. A. Physical., 2006-11, Vol.132 (1), p.207-213 |
| issn | 0924-4247 1873-3069 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29395015 |
| source | Elsevier ScienceDirect Journals |
| subjects | CO 2 Photo acoustic gas sensor Pressure sensor |
| title | High-resolution pressure sensor for photo acoustic gas detection |
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