A low-cost rate-grade nickel microgyroscope

This paper presents a low-cost microgyroscope with a resolution in the rate-grade at atmospheric pressure, which is fabricated using a CMOS-compatible nickel electroforming process. Angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense mod...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2006-11, Vol.132 (1), p.171-181
Hauptverfasser:	Alper, Said Emre, Silay, Kanber Mithat, Akin, Tayfun
Format:	Artikel
Sprache:	eng
Schlagworte:	Angular rate sensor Decoupled oscillation modes Gyroscope Nickel electroforming
Online-Zugang:	Volltext
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