Improvement of Adhesion of Cubic Boron Nitride Films: Effect of Interlayer and Deposition Parameters

Diamond and B4C coatings were used as an interlayer for the growth of cubic boron nitride thin films on c-silicon. By employing a B-C-N gradient layer on top of the B4C interlayer, improved adhesion occured between BN and B4C. A multi-step process after the nucleation of c-BN was found very helpful...

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Veröffentlicht in:	Materials science forum 2005-01, Vol.475-479, p.3635-3640
Hauptverfasser:	Li, Cheng Ming, Messier, Russell F., He, Qi, Pilione, Lawrence, Lu, Fan Xiu
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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