DLC-SiOx nanocomposite films deposited from CH4 : SiH4 : O2 gas mixtures

Nanocomposite DLC-SiOx films were deposited by PECVD from CH4: SiH4:O2 gas mixtures. The effects of gas mixture composition and self-bias voltage on the optical and mechanical properties of these films were investigated. Results show that high optical gap (~3 eV) coatings can be obtained at low oxyg...

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Veröffentlicht in:	Surface & coatings technology 2006-06, Vol.200 (22-23), p.6279-6282
Hauptverfasser:	DAMASCENO, J. C, CAMARGO, S. S
Format:	Artikel
Sprache:	eng
Schlagworte:	Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Other topics in materials science Physics
Online-Zugang:	Volltext
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