Lateral resolution of secondary ion mass spectrometry-results of an inter-laboratory comparison

Recently, BAM organised an inter‐laboratory comparison focussed on lateral resolution and accuracy of sub‐micron length measurements by secondary ion mass spectrometry (SIMS). Results were submitted by 16 laboratories from 10 countries. The task was to analyse a cross‐sectioned semiconductor multila...

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Veröffentlicht in:	Surface and interface analysis 2007-01, Vol.39 (1), p.16-25
Hauptverfasser:	Senoner, M., Unger, W. E. S.
Format:	Artikel
Sprache:	eng
Schlagworte:	accuracy Atomic, molecular, and ion beam impact and interactions with surfaces Condensed matter: electronic structure, electrical, magnetic, and optical properties deconvolution edge method edge spread function Electron and ion emission by liquids and solids impact phenomena ESF Exact sciences and technology Impact phenomena (including electron spectra and sputtering) inter-laboratory comparison ion microscopy lateral resolution length scale calibration line spread function LSF modulation transfer function MTF nanometrology nanotechnology Physics primary ion beam width SIMS square-wave grating strip pattern
Online-Zugang:	Volltext
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