MOVPE growth and real structure of vertical-aligned GaAs nanowires

We studied the influence of the substrate preparation and the growth conditions important to fabricate GaAs nanowires (NWs) with metal-organic vapor phase epitaxy. The growth parameters temperature, precursor partial pressures and growth duration were investigated. The definite choice of the V/III r...

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Veröffentlicht in:Journal of crystal growth 2007, Vol.298, p.625-630
Hauptverfasser: Bauer, J., Gottschalch, V., Paetzelt, H., Wagner, G., Fuhrmann, B., Leipner, H.S.
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container_end_page 630
container_issue
container_start_page 625
container_title Journal of crystal growth
container_volume 298
creator Bauer, J.
Gottschalch, V.
Paetzelt, H.
Wagner, G.
Fuhrmann, B.
Leipner, H.S.
description We studied the influence of the substrate preparation and the growth conditions important to fabricate GaAs nanowires (NWs) with metal-organic vapor phase epitaxy. The growth parameters temperature, precursor partial pressures and growth duration were investigated. The definite choice of the V/III ratio enables NW length growth independent on the diameter. By investigating the temporal evolution of the GaAs-NW growth a diameter-dependent growth rate could be determined. Applying nanosphere lithography arranged GaAs-NW arrays were achieved. The NWs morphology and real structure was investigated using (high-resolution) transmission electron microscopy and selective area diffraction. The twin formation in GaAs NWs was investigated. A crystallographic model is presented.
doi_str_mv 10.1016/j.jcrysgro.2006.10.082
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subjects A1. Nanostructures
A3. Metal-organic vapor phase epitaxy
B2. Semiconducting gallium arsenide
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nanoscale materials and structures: fabrication and characterization
Other semiconductors
Physics
Quantum wires
Specific materials
Theory and models of film growth
Vapor phase epitaxy
growth from vapor phase
title MOVPE growth and real structure of vertical-aligned GaAs nanowires
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