Fabrication of polymer SAW sensor array to classify chemical warfare agents

An array with five SAW sensors using different kinds of polymers was fabricated to detect chemical agents and their gas response characteristics were extensively investigated. The SAW devices with different interdigital transducer (IDT) electrode line widths of 3, 4, 6, 8 and 20 μm, which correspond...

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Veröffentlicht in:Sensors and actuators. B, Chemical Chemical, 2007-01, Vol.121 (1), p.47-53
Hauptverfasser: Joo, Byung-Su, Huh, Jeung-Soo, Lee, Duk-Dong
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Sprache:eng
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