Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components
A laser beam profilometry technique was used to investigate residual stress accumulation during TiN deposition and stress relaxation during post-deposition heat treatment. The test coatings were reactively sputtered on silicon and steel substrates using a UMS technique. TiN coatings, deposited at di...
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| Veröffentlicht in: | Materials science forum 2006-09, Vol.524-525, p.867-872 |
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| creator | Bielawski, Mariusz |
| description | A laser beam profilometry technique was used to investigate residual stress accumulation
during TiN deposition and stress relaxation during post-deposition heat treatment. The test coatings
were reactively sputtered on silicon and steel substrates using a UMS technique. TiN coatings,
deposited at different bias and pressure levels, were evaluated for residual stress and microhardness.
It was found that both the residual stress and the hardness were strongly affected by the coating
deposition conditions. In addition, stress-temperature correlations were obtained by subjecting the
coatings to temperature cycles up to 450°C. Stress-temperature plots revealed that the level of
residual stress relaxation depended on deposition conditions and only coatings deposited at low ion
bombardment could be fully annealed. The role of intrinsic and thermal stresses in the total residual
stress in the coating/substrate system was also discussed. |
| doi_str_mv | 10.4028/www.scientific.net/MSF.524-525.867 |
| format | Article |
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during TiN deposition and stress relaxation during post-deposition heat treatment. The test coatings
were reactively sputtered on silicon and steel substrates using a UMS technique. TiN coatings,
deposited at different bias and pressure levels, were evaluated for residual stress and microhardness.
It was found that both the residual stress and the hardness were strongly affected by the coating
deposition conditions. In addition, stress-temperature correlations were obtained by subjecting the
coatings to temperature cycles up to 450°C. Stress-temperature plots revealed that the level of
residual stress relaxation depended on deposition conditions and only coatings deposited at low ion
bombardment could be fully annealed. The role of intrinsic and thermal stresses in the total residual
stress in the coating/substrate system was also discussed.</description><identifier>ISSN: 0255-5476</identifier><identifier>ISSN: 1662-9752</identifier><identifier>EISSN: 1662-9752</identifier><identifier>DOI: 10.4028/www.scientific.net/MSF.524-525.867</identifier><language>eng</language><publisher>Trans Tech Publications Ltd</publisher><ispartof>Materials science forum, 2006-09, Vol.524-525, p.867-872</ispartof><rights>2006 Trans Tech Publications Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c301t-bd8ef39242008bef30ce2d233be824da54e5214b3ae3a36bb266f1c2138968743</citedby><cites>FETCH-LOGICAL-c301t-bd8ef39242008bef30ce2d233be824da54e5214b3ae3a36bb266f1c2138968743</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Uhttps://www.scientific.net/Image/TitleCover/44?width=600</thumbnail><link.rule.ids>314,776,780,27903,27904</link.rule.ids></links><search><creatorcontrib>Bielawski, Mariusz</creatorcontrib><title>Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components</title><title>Materials science forum</title><description>A laser beam profilometry technique was used to investigate residual stress accumulation
during TiN deposition and stress relaxation during post-deposition heat treatment. The test coatings
were reactively sputtered on silicon and steel substrates using a UMS technique. TiN coatings,
deposited at different bias and pressure levels, were evaluated for residual stress and microhardness.
It was found that both the residual stress and the hardness were strongly affected by the coating
deposition conditions. In addition, stress-temperature correlations were obtained by subjecting the
coatings to temperature cycles up to 450°C. Stress-temperature plots revealed that the level of
residual stress relaxation depended on deposition conditions and only coatings deposited at low ion
bombardment could be fully annealed. The role of intrinsic and thermal stresses in the total residual
stress in the coating/substrate system was also discussed.</description><issn>0255-5476</issn><issn>1662-9752</issn><issn>1662-9752</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNqVkE1P3DAQhi3USmwp_8EnDpUS_BE73iPdLgWJAuLjiuU4k9Yoa2_tpCv-PQNbqecerPGM3nln5iHkC2d1w4Q53e12dfEB4hSG4OsI0-mP-_NaiaZSQtVGtwdkwbUW1bJV4gNZMKFUpZpWH5JPpTwzJrnhekGe7qCEfnYjvZ8ylELXf9w4uymkSEOkD-GarhKm8WehjwV6OqRM1zmVN8FtThP4d20a6Blgees8YMdmmyIuVz6Tj4MbCxz_jUfk8Xz9sLqorm6-X67OriovGZ-qrjcwyKVoBGOmwy_zIHohZQdGNL1TDSjBm046kE7qrhNaD9wLLs1Sm7aRR-Rk77vN6fcMZbKbUDyMo4uQ5mLFUuKg1qDw617ocdmSYbDbHDYuv1jO7Btai2jtP7QW0VpEaxEtPmURLZp825tM2cWCCH7Z5zTniBf-j80rjgONjw</recordid><startdate>20060915</startdate><enddate>20060915</enddate><creator>Bielawski, Mariusz</creator><general>Trans Tech Publications Ltd</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20060915</creationdate><title>Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components</title><author>Bielawski, Mariusz</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c301t-bd8ef39242008bef30ce2d233be824da54e5214b3ae3a36bb266f1c2138968743</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bielawski, Mariusz</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Materials science forum</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Bielawski, Mariusz</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components</atitle><jtitle>Materials science forum</jtitle><date>2006-09-15</date><risdate>2006</risdate><volume>524-525</volume><spage>867</spage><epage>872</epage><pages>867-872</pages><issn>0255-5476</issn><issn>1662-9752</issn><eissn>1662-9752</eissn><abstract>A laser beam profilometry technique was used to investigate residual stress accumulation
during TiN deposition and stress relaxation during post-deposition heat treatment. The test coatings
were reactively sputtered on silicon and steel substrates using a UMS technique. TiN coatings,
deposited at different bias and pressure levels, were evaluated for residual stress and microhardness.
It was found that both the residual stress and the hardness were strongly affected by the coating
deposition conditions. In addition, stress-temperature correlations were obtained by subjecting the
coatings to temperature cycles up to 450°C. Stress-temperature plots revealed that the level of
residual stress relaxation depended on deposition conditions and only coatings deposited at low ion
bombardment could be fully annealed. The role of intrinsic and thermal stresses in the total residual
stress in the coating/substrate system was also discussed.</abstract><pub>Trans Tech Publications Ltd</pub><doi>10.4028/www.scientific.net/MSF.524-525.867</doi><tpages>6</tpages></addata></record> |
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| title | Residual Stress Evaluation in TiN Coatings Used for Erosion Protection of Aerospace Components |
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