Optical and compositional analysis of functional SiOxCy:H coatings on polymers

At present, optical polymers are increasingly replacing glass in several applications, including the field of ophthalmic lenses. In the present work, protecting and optical SiOxCy:H coatings have been deposited by Plasma Enhanced Chemical Vapor Deposition onto polymeric substrates at low temperature...

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Veröffentlicht in:	Thin solid films 2006-12, Vol.515 (4), p.2493-2496
Hauptverfasser:	Martín-Palma, R.J., Gago, R., Torres-Costa, V., Fernández-Hidalgo, P., Kreissig, U., Martínez Duart, J.M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Elastic recoil detection Optical coating Plasma-enhanced CVD Silicon oxycarbide Visible spectrometry
Online-Zugang:	Volltext
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