Preparation of Stabilizing Solution for PZT Film by CSD-Method
We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexano...
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| Veröffentlicht in: | Journal of the Ceramic Society of Japan 2005, Vol.113(1322), pp.658-662 |
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| container_title | Journal of the Ceramic Society of Japan |
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| creator | SHIMIZU, Chiemi UCHIDA, Fumio MAEDA, Kenji KOBAYASHI, Motokazu KUBOTA, Makoto ERITATE, Shinji MUROYA, Masaaki |
| description | We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2. |
| doi_str_mv | 10.2109/jcersj.113.658 |
| format | Article |
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The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2.</description><identifier>ISSN: 0914-5400</identifier><identifier>ISSN: 1882-0743</identifier><identifier>EISSN: 1882-1022</identifier><identifier>EISSN: 1348-6535</identifier><identifier>DOI: 10.2109/jcersj.113.658</identifier><language>eng ; jpn</language><publisher>Tokyo: The Ceramic Society of Japan</publisher><subject>DBU ; Ferroelectric properties ; Long life stability ; PZT ; Solution</subject><ispartof>Journal of the Ceramic Society of Japan, 2005, Vol.113(1322), pp.658-662</ispartof><rights>2005 The Ceramic Society of Japan</rights><rights>Copyright Japan Science and Technology Agency 2005</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c360t-6f226882e3b4e159ab99cdfefd0e388fa4c18290feef9bfef7061dc31c12452e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,1881,4022,27922,27923,27924</link.rule.ids></links><search><creatorcontrib>SHIMIZU, Chiemi</creatorcontrib><creatorcontrib>UCHIDA, Fumio</creatorcontrib><creatorcontrib>MAEDA, Kenji</creatorcontrib><creatorcontrib>KOBAYASHI, Motokazu</creatorcontrib><creatorcontrib>KUBOTA, Makoto</creatorcontrib><creatorcontrib>ERITATE, Shinji</creatorcontrib><creatorcontrib>MUROYA, Masaaki</creatorcontrib><title>Preparation of Stabilizing Solution for PZT Film by CSD-Method</title><title>Journal of the Ceramic Society of Japan</title><addtitle>J. Ceram. Soc. Japan</addtitle><description>We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2.</description><subject>DBU</subject><subject>Ferroelectric properties</subject><subject>Long life stability</subject><subject>PZT</subject><subject>Solution</subject><issn>0914-5400</issn><issn>1882-0743</issn><issn>1882-1022</issn><issn>1348-6535</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNpdkE1LAzEQhoMoWGqvnhcEb1vztdvNRZBq_aBiofXiJWSzkzbLdlOT7aH-eqOVKp5meHneYXgQOid4SAkWV7UGH-ohIWyYZ8UR6pGioCnBlB6jHhaEpxnH-BQNQrAlxpQXPMesh65nHjbKq866NnEmmXeqtI39sO0ymbtm-50b55PZ2yKZ2GadlLtkPL9Nn6FbueoMnRjVBBj8zD56ndwtxg_p9OX-cXwzTTXLcZfmhtI8PgSs5EAyoUohdGXAVBhYURjFNSmowAbAiDLmI5yTSjOiCeVZrPXR5f7uxrv3LYROrm3Q0DSqBbcNkgqGORmJCF78A2u39W38TRLOs0IImvFIDfeU9i4ED0ZuvF0rv5MEyy-fcu9TRp8y-oyFp32hDp1awgFXvrO6gb84YZT-LrF8gPRKeQkt-wSLYIJc</recordid><startdate>2005</startdate><enddate>2005</enddate><creator>SHIMIZU, Chiemi</creator><creator>UCHIDA, Fumio</creator><creator>MAEDA, Kenji</creator><creator>KOBAYASHI, Motokazu</creator><creator>KUBOTA, Makoto</creator><creator>ERITATE, Shinji</creator><creator>MUROYA, Masaaki</creator><general>The Ceramic Society of Japan</general><general>Japan Science and Technology Agency</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>2005</creationdate><title>Preparation of Stabilizing Solution for PZT Film by CSD-Method</title><author>SHIMIZU, Chiemi ; UCHIDA, Fumio ; MAEDA, Kenji ; KOBAYASHI, Motokazu ; KUBOTA, Makoto ; ERITATE, Shinji ; MUROYA, Masaaki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c360t-6f226882e3b4e159ab99cdfefd0e388fa4c18290feef9bfef7061dc31c12452e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng ; jpn</language><creationdate>2005</creationdate><topic>DBU</topic><topic>Ferroelectric properties</topic><topic>Long life stability</topic><topic>PZT</topic><topic>Solution</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>SHIMIZU, Chiemi</creatorcontrib><creatorcontrib>UCHIDA, Fumio</creatorcontrib><creatorcontrib>MAEDA, Kenji</creatorcontrib><creatorcontrib>KOBAYASHI, Motokazu</creatorcontrib><creatorcontrib>KUBOTA, Makoto</creatorcontrib><creatorcontrib>ERITATE, Shinji</creatorcontrib><creatorcontrib>MUROYA, Masaaki</creatorcontrib><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Journal of the Ceramic Society of Japan</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>SHIMIZU, Chiemi</au><au>UCHIDA, Fumio</au><au>MAEDA, Kenji</au><au>KOBAYASHI, Motokazu</au><au>KUBOTA, Makoto</au><au>ERITATE, Shinji</au><au>MUROYA, Masaaki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Preparation of Stabilizing Solution for PZT Film by CSD-Method</atitle><jtitle>Journal of the Ceramic Society of Japan</jtitle><addtitle>J. Ceram. Soc. Japan</addtitle><date>2005</date><risdate>2005</risdate><volume>113</volume><issue>1322</issue><spage>658</spage><epage>662</epage><pages>658-662</pages><issn>0914-5400</issn><issn>1882-0743</issn><eissn>1882-1022</eissn><eissn>1348-6535</eissn><abstract>We attempted to manufacture long life span stabilizing solution for obtain PZT precursor and/or filmy lead zirconate titanate, Pbx(ZryTi1-y)O3. The precursor solutions were synthesized by using the original solution of Pb-acetate, Ti- and Zr-alkoxide and four kinds of stabilizers, DBU, 2-ethylhexanoic acid, ammonia and acetic acid. The DBU contained precursor solution is mostly stable compared with that of the solutions contained other stabilizers, and its DBU contained solution can stand for at least over one year. Thick PZT film of (100) orientation with 0.22 μm thickness was made on PTO/Pt/SiO2/Si substrate by using CSD-method from DBU contained precursor solution. For this film, the estimated electrical resistivity was 6.2×1010 Ω•cm, the dielectric constant of 1300 and the residual polarity, Pr, of 21.1 μC/cm2.</abstract><cop>Tokyo</cop><pub>The Ceramic Society of Japan</pub><doi>10.2109/jcersj.113.658</doi><tpages>5</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | DBU Ferroelectric properties Long life stability PZT Solution |
| title | Preparation of Stabilizing Solution for PZT Film by CSD-Method |
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