High-Resolution Patterning of Molecular Glasses Using Supercritical Carbon Dioxide

A glass‐forming molecule, consisting of hexa(hydroxyphenyl)benzene [HHPB] protected with six tert‐butoxycarbonyl (t‐Boc) groups, is patterned and developed to produce features as small as 50 nm (see Figure) using supercritical CO2 (scCO2). Protected HHPB was shown to be completely soluble in scCO2 w...

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Veröffentlicht in:	Advanced materials (Weinheim) 2006-02, Vol.18 (4), p.442-446
Hauptverfasser:	Felix, N. M., Tsuchiya, K., Ober, C. K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Molecular glasses Photolithography Supercritical fluids
Online-Zugang:	Volltext
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