Generalized parametric resonance in electrostatically actuated microelectromechanical oscillators

This paper investigates the dynamic response of a class of electrostatically driven microelectromechanical (MEM) oscillators. The particular systems of interest are those which feature parametric excitation that arises from forces produced by fluctuating voltages applied across comb drives. These sy...

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Veröffentlicht in:	Journal of sound and vibration 2006-10, Vol.296 (4), p.797-829
Hauptverfasser:	Rhoads, Jeffrey F., Shaw, Steven W., Turner, Kimberly L., Moehlis, Jeff, DeMartini, Barry E., Zhang, Wenhua
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Exact sciences and technology Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Micromechanical devices and systems Physics Solid mechanics Structural and continuum mechanics Transduction acoustical devices for the generation and reproduction of sound Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
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