Low temperature performance of miniature capacitive pressure sensor with submicron gap
Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This se...
Gespeichert in:
| Veröffentlicht in: | Journal of low temperature physics 2005-02, Vol.138 (3-4), p.917-921 |
|---|---|
| Hauptverfasser: | , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 921 |
|---|---|
| container_issue | 3-4 |
| container_start_page | 917 |
| container_title | Journal of low temperature physics |
| container_volume | 138 |
| creator | HIEDA, M KATO, T HIRANO, D MATSUSHITA, T WADA, N |
| description | Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This sensor can distinguish a change of 0.05 Pa in the pressure of helium vapor estimated from a long term stability at 4.0 K. This type of miniature pressure sensor should be useful as a research tool at cryogenic temperatures. |
| doi_str_mv | 10.1007/s10909-005-2325-9 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_29277128</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>29277128</sourcerecordid><originalsourceid>FETCH-LOGICAL-c306t-b573abb7879d5bc52e332bfaf5e1eaee00f2116330165bf6d73c0035c22ed39a3</originalsourceid><addsrcrecordid>eNpFkEtLBDEQhIMouK7-AG9z0dtoJyGTyVEWX7DgRb2GTLajkXmZnnHx35tlFzx1011VFB9jlxxuOIC-JQ4GTAmgSiGFKs0RW3ClZaml0sdsASBEKYThp-yM6AsATF3JBXtfD9tiwm7E5KY5YZGXMKTO9R6LIRRd7OP-4d3ofJziT9YkJNrdCHsaUrGN02dBc9NFn4a--HDjOTsJriW8OMwle3u4f109leuXx-fV3br0EqqpbHJD1zS61majGq8ESima4IJCjg4RIAjOKymBV6oJ1UZLDyCVFwI30ji5ZNf73DEN3zPSZLtIHtvW9TjMZIURWnNRZyHfC3NDooTBjil2Lv1aDnZH0O4J2kzQ7ghakz1Xh3BH3rUhZSiR_o01r6vKSPkHWPNymw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>29277128</pqid></control><display><type>article</type><title>Low temperature performance of miniature capacitive pressure sensor with submicron gap</title><source>SpringerLink Journals - AutoHoldings</source><creator>HIEDA, M ; KATO, T ; HIRANO, D ; MATSUSHITA, T ; WADA, N</creator><creatorcontrib>HIEDA, M ; KATO, T ; HIRANO, D ; MATSUSHITA, T ; WADA, N</creatorcontrib><description>Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This sensor can distinguish a change of 0.05 Pa in the pressure of helium vapor estimated from a long term stability at 4.0 K. This type of miniature pressure sensor should be useful as a research tool at cryogenic temperatures.</description><identifier>ISSN: 0022-2291</identifier><identifier>EISSN: 1573-7357</identifier><identifier>DOI: 10.1007/s10909-005-2325-9</identifier><identifier>CODEN: JLTPAC</identifier><language>eng</language><publisher>Heidelberg: Springer</publisher><subject>Exact sciences and technology ; General equipment and techniques ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Physics ; Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><ispartof>Journal of low temperature physics, 2005-02, Vol.138 (3-4), p.917-921</ispartof><rights>2006 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c306t-b573abb7879d5bc52e332bfaf5e1eaee00f2116330165bf6d73c0035c22ed39a3</citedby><cites>FETCH-LOGICAL-c306t-b573abb7879d5bc52e332bfaf5e1eaee00f2116330165bf6d73c0035c22ed39a3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>309,310,314,776,780,785,786,23909,23910,25118,27901,27902</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=18186693$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>HIEDA, M</creatorcontrib><creatorcontrib>KATO, T</creatorcontrib><creatorcontrib>HIRANO, D</creatorcontrib><creatorcontrib>MATSUSHITA, T</creatorcontrib><creatorcontrib>WADA, N</creatorcontrib><title>Low temperature performance of miniature capacitive pressure sensor with submicron gap</title><title>Journal of low temperature physics</title><description>Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This sensor can distinguish a change of 0.05 Pa in the pressure of helium vapor estimated from a long term stability at 4.0 K. This type of miniature pressure sensor should be useful as a research tool at cryogenic temperatures.</description><subject>Exact sciences and technology</subject><subject>General equipment and techniques</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Physics</subject><subject>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</subject><issn>0022-2291</issn><issn>1573-7357</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNpFkEtLBDEQhIMouK7-AG9z0dtoJyGTyVEWX7DgRb2GTLajkXmZnnHx35tlFzx1011VFB9jlxxuOIC-JQ4GTAmgSiGFKs0RW3ClZaml0sdsASBEKYThp-yM6AsATF3JBXtfD9tiwm7E5KY5YZGXMKTO9R6LIRRd7OP-4d3ofJziT9YkJNrdCHsaUrGN02dBc9NFn4a--HDjOTsJriW8OMwle3u4f109leuXx-fV3br0EqqpbHJD1zS61majGq8ESima4IJCjg4RIAjOKymBV6oJ1UZLDyCVFwI30ji5ZNf73DEN3zPSZLtIHtvW9TjMZIURWnNRZyHfC3NDooTBjil2Lv1aDnZH0O4J2kzQ7ghakz1Xh3BH3rUhZSiR_o01r6vKSPkHWPNymw</recordid><startdate>20050201</startdate><enddate>20050201</enddate><creator>HIEDA, M</creator><creator>KATO, T</creator><creator>HIRANO, D</creator><creator>MATSUSHITA, T</creator><creator>WADA, N</creator><general>Springer</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20050201</creationdate><title>Low temperature performance of miniature capacitive pressure sensor with submicron gap</title><author>HIEDA, M ; KATO, T ; HIRANO, D ; MATSUSHITA, T ; WADA, N</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c306t-b573abb7879d5bc52e332bfaf5e1eaee00f2116330165bf6d73c0035c22ed39a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Exact sciences and technology</topic><topic>General equipment and techniques</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Physics</topic><topic>Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>HIEDA, M</creatorcontrib><creatorcontrib>KATO, T</creatorcontrib><creatorcontrib>HIRANO, D</creatorcontrib><creatorcontrib>MATSUSHITA, T</creatorcontrib><creatorcontrib>WADA, N</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of low temperature physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>HIEDA, M</au><au>KATO, T</au><au>HIRANO, D</au><au>MATSUSHITA, T</au><au>WADA, N</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Low temperature performance of miniature capacitive pressure sensor with submicron gap</atitle><jtitle>Journal of low temperature physics</jtitle><date>2005-02-01</date><risdate>2005</risdate><volume>138</volume><issue>3-4</issue><spage>917</spage><epage>921</epage><pages>917-921</pages><issn>0022-2291</issn><eissn>1573-7357</eissn><coden>JLTPAC</coden><abstract>Recent development of micromachining techniques enables us to make tiny sensors, which are tempting for use in low temperature studies. We tested a miniature capacitive pressure sensor which was designed specially for a commercial sphygmomanometer, and report the low temperature performance. This sensor can distinguish a change of 0.05 Pa in the pressure of helium vapor estimated from a long term stability at 4.0 K. This type of miniature pressure sensor should be useful as a research tool at cryogenic temperatures.</abstract><cop>Heidelberg</cop><pub>Springer</pub><doi>10.1007/s10909-005-2325-9</doi><tpages>5</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0022-2291 |
| ispartof | Journal of low temperature physics, 2005-02, Vol.138 (3-4), p.917-921 |
| issn | 0022-2291 1573-7357 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_29277128 |
| source | SpringerLink Journals - AutoHoldings |
| subjects | Exact sciences and technology General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Physics Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing |
| title | Low temperature performance of miniature capacitive pressure sensor with submicron gap |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-09T10%3A03%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Low%20temperature%20performance%20of%20miniature%20capacitive%20pressure%20sensor%20with%20submicron%20gap&rft.jtitle=Journal%20of%20low%20temperature%20physics&rft.au=HIEDA,%20M&rft.date=2005-02-01&rft.volume=138&rft.issue=3-4&rft.spage=917&rft.epage=921&rft.pages=917-921&rft.issn=0022-2291&rft.eissn=1573-7357&rft.coden=JLTPAC&rft_id=info:doi/10.1007/s10909-005-2325-9&rft_dat=%3Cproquest_cross%3E29277128%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=29277128&rft_id=info:pmid/&rfr_iscdi=true |