Growth and characterization of piezoelectric AlN thin films for diamond-based surface acoustic wave devices

We report on the preparation and structural characterization of piezoelectric films of aluminium nitride onto diamond substrates. The samples were fabricated by sequential radio frequency reactive diode sputtering processes, carried out at various temperatures, in a head vacuum system starting from...

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Veröffentlicht in:	Thin solid films 2006-02, Vol.497 (1-2), p.304-308
Hauptverfasser:	Benetti, M., Cannatà, D., Di Pietrantonio, F., Verona, E., Generosi, A., Paci, B., Rossi Albertini, V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustoelectric effects and surface acoustic waves (saw) in piezoelectrics Aluminium nitride Condensed matter: electronic structure, electrical, magnetic, and optical properties Diamond Dielectric, piezoelectric, ferroelectric and antiferroelectric materials Dielectrics, piezoelectrics, and ferroelectrics and their properties Elements, oxides, nitrides, borides, carbides, chalcogenides, etc Exact sciences and technology Physics Piezoelectricity and electromechanical effects Sputtering
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