Effect of thermal treatment in oxygen, nitrogen, and air atmospheres on the electrical transport properties of zinc oxide thin films

The effects of thermal treatment in oxygen, air, and nitrogen gas atmospheres, at temperatures ranging from 573 to 1173 K, on the electrical transport properties of thin films of zinc oxide, prepared by sputtering deposition, have been investigated. These experiments have been carried out in prepara...

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Veröffentlicht in:	Thin solid films 2005-10, Vol.489 (1), p.303-309
Hauptverfasser:	Hamad, Omima, Braunstein, Gabriel, Patil, Harshad, Dhere, Neelkanth
Format:	Artikel
Sprache:	eng
Schlagworte:	73.50.-h 73.61.Ga Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Electrical properties and measurements Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Exact sciences and technology Heat treatment Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Sputtering Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Zinc oxide
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