Fabrication of Stable Metallic Patterns Embedded in Poly(dimethylsiloxane) and Model Applications in Non-Planar Electronic and Lab-on-a-Chip Device Patterning

This article describes the fabrication of durable metallic patterns that are embedded in poly(dimethylsiloxane) (PDMS) and demonstrates their use in several representative applications. The method involves the transfer and subsequent embedding of micrometer‐scale gold (and other thin‐film material)...

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Veröffentlicht in:	Advanced functional materials 2005-04, Vol.15 (4), p.557-566
Hauptverfasser:	Lee, K. J., Fosser, K. A., Nuzzo, R. G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Microelectronics Patterning Poly(dimethylsiloxane) Soft lithography
Online-Zugang:	Volltext
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