Advanced CIM environment for manufacturing data analysis

The Harris semiconductor manufacturing systems organization has released a new environment for performing complex analyses of semiconductor manufacturing processes and IC products in its facilities worldwide. This innovative analysis toolset has increased the productivity of engineers by providing a...

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Veröffentlicht in:	IEEE transactions on semiconductor manufacturing 1993-05, Vol.6 (2), p.128-133
Hauptverfasser:	Miller, W.H. Jr, Poole, M.W.
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer integrated manufacturing Data analysis Data engineering Manufacturing processes Manufacturing systems Performance analysis Probes Relational databases Semiconductor device manufacture Statistical analysis
Online-Zugang:	Volltext bestellen
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