Effect of Geometry and Materials on Residual Stress Measurement in Thin Films by Using the Focused Ion Beam

Recently, a new method for residual stress measurement in thin films by using the focused ion beam (FIB) has been proposed by the authors. It is based on the combined capability of the FIB imaging system and of high-resolution strain mapping software (VIC-2D). A simple equation based on two-dimensio...

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Veröffentlicht in:	Journal of engineering materials and technology 2004-10, Vol.126 (4), p.457-464
Hauptverfasser:	Kang, Ki-Ju, Darzens, Severine, Choi, Gee-Seob
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Physics Solid mechanics Static elasticity (thermoelasticity...) Structural and continuum mechanics
Online-Zugang:	Volltext
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