Biaxial alignment in sputter deposited thin films

Biaxially aligned thin films have not only a preferential crystallographic out-of-plane orientation, but also have an alignment along a certain reference direction parallel to the substrate plane. This type of film has been obtained by unbalanced reactive magnetron sputter deposition on both amorpho...

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Veröffentlicht in:	Thin solid films 2006-12, Vol.515 (4), p.1229-1249
Hauptverfasser:	Mahieu, S., Ghekiere, P., Depla, D., De Gryse, R.
Format:	Artikel
Sprache:	eng
Schlagworte:	Biaxial alignment Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Growth mechanism Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Preferential orientation Sputtering Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology
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