Adhesion studies of diamond-like carbon films deposited on Ti6Al4V substrate with a silicon interlayer

Diamond-like carbon (DLC) films have proven quite advantageous in many tribological applications due to their low friction coefficient, their extreme hardness, and more recently their high adherence on different substrate materials. However, for many applications, DLC films as thick as 2 μm are requ...

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Veröffentlicht in:	Thin solid films 2006-09, Vol.515 (1), p.375-379
Hauptverfasser:	Bonetti, L.F., Capote, G., Santos, L.V., Corat, E.J., Trava-Airoldi, V.J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Anelasticity, internal friction, stress relaxation, and mechanical resonances Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Diamond-like carbon (DLC) Exact sciences and technology Materials science Mechanical and acoustical properties of condensed matter Mechanical and acoustical properties adhesion Mechanical properties of solids Methods of deposition of films and coatings film growth and epitaxy PECVD Physics Silicon interlayer Solid surfaces and solid-solid interfaces Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Tribology and hardness
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