Diamond-like carbon films synthesized on bearing steel surface by plasma immersion ion implantation and deposition
Diamond-like carbon (DLC) films were synthesized by plasma immersion ion implantation and deposition (PIIID) on 9Cr18 bearing steel surface. Influences of working gas pressure and pulse width of the bias voltage on properties of the thin film were investigated. The chemical compositions of the as-de...
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Veröffentlicht in: | Transactions of Nonferrous Metals Society of China 2004-10, Vol.14 (2), p.291-295 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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