Deep oxidation of aluminum by a DC oxygen plasma
A novel way of oxidising aluminum using a DC oxygen plasma is described. The oxidation is carried out with a pressure of ∼0.1 bar, an electrical current lower than 3 mA, and a working distance between the electrodes of the order of 1 cm. The pressure is seen to have a stronger influence on the resul...
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Veröffentlicht in: | Surface & coatings technology 2005-05, Vol.195 (2), p.168-175 |
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Format: | Artikel |
Sprache: | eng |
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