Deep oxidation of aluminum by a DC oxygen plasma

A novel way of oxidising aluminum using a DC oxygen plasma is described. The oxidation is carried out with a pressure of ∼0.1 bar, an electrical current lower than 3 mA, and a working distance between the electrodes of the order of 1 cm. The pressure is seen to have a stronger influence on the resul...

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Veröffentlicht in:Surface & coatings technology 2005-05, Vol.195 (2), p.168-175
Hauptverfasser: Baier-Saip, J.A., Avila, J.I., Tarrach, G., Cabrera, A.L., Fuenzalida, V., Zarate, R.A., Schuller, I.K.
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Sprache:eng
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