Novel Microsystem Applications with New Techniques in Low-Temperature Co-Fired Ceramics

Low‐temperature co‐fired ceramic (LTCC) enables development and testing of critical elements on microsystem boards as well as nonmicroelectronic meso‐scale applications. We describe silicon‐based microelectromechanical systems packaging and LTCC meso‐scale applications. Microfluidic interposers perm...

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Veröffentlicht in:	International journal of applied ceramic technology 2005-01, Vol.2 (5), p.345-363
Hauptverfasser:	Peterson, K. A., Patel, K. D., Ho, C. K., Rohde, S. B., Nordquist, C. D., Walker, C. A., Wroblewski, B. D., Okandan, M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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