Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)

The processing and application of graphite powder-based sacrificial layer for fabrication of microfluidic structures in LTCC is described. Such layers are produced as pastes, which are screen-printed in LTCC sheets to avoid sagging, by supporting closed, three-dimensional structures such as channels...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2006-08, Vol.130, p.560-567
Hauptverfasser:	Birol, Hansu, Maeder, Thomas, Ryser, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Fabrication of microfluidic structures LTCC Permeability of LTCC Sacrificial layer
Online-Zugang:	Volltext
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